Initiated Chemical Vapor Deposition
引發(fā)式化學(xué)氣相沉積（iCVD），方法是一種綠色新型的功能高分子薄膜制備方法。結(jié)合傳統(tǒng)的液相自由基聚合反應(yīng)與化學(xué)氣相沉積技術(shù)，iCVD方法將聚合所需的引發(fā)劑和功能單體氣化引入腔體，在較低加熱溫度下誘導(dǎo)引發(fā)劑裂解，使單體聚合成高分子薄膜沉積于基底上。沉積過程中基底溫度控制在室溫范圍，因此不會傷害其性能。與傳統(tǒng)液相制備過程相比，iCVD法制得薄膜致密均勻、厚度可控，且適用于任何材質(zhì)的基底；與PECVD等高能氣相法相比，其條件溫和、過程可控，且可保留所需官能團。
The iCVD Coating System is a research & development level polymer chemical vapor deposition coating system specifically designed to bring polymer vapor deposition technology to the laboratory. This coating system is an excellent choice for research institutions and universities looking to develop and design with the emerging leader in thin polymer coating technology.
Our customers can depend on decades of expertise with polymer vapor deposition technology, between our commercial success and our leadership's academic experience, to provide a research or educational tool that grants the greatest range of possibility for coating development utilizing a recipe-driven, easy-to-use, automated system. With a variety of options available to enhance the coating system or allow for a greater variety of polymer compositions, we will work with you to decide the right system for your needs. We can offer full-service support ranging from the sale of a standalone system to design, installation, training, support, and licensing for custom applications.
Features
· Intuitive PC-based control system
· Custom stainless steel vacuum chamber with temperature controlled stage
· Tensioned hot filament array
· Automatic pressure control
· Heated precursor delivery system with automatic temperature control and optional automatic flow control
· Real time thickness measurement
· Fully contained in vented enclosure
· Oil-sealed rotary vane vacuum pump with foreline trap and outlet mist filter
Options
· Additional precursor feed lines
· Low-volatility precursor delivery system
· Safety and Automation Package
· In-situ thickness measurement via quartz crystal microbalance (QCM)
· Programmable DC Power Supply for filament heating
· Dry pumping system
· Extended service and support agreements
· On-site training
Applications
· Biomedical
· Microfluidics
· Nanotechnology
· Undergraduate unit operations labs
· Academic research labs
· Government labs
